Laser damage resistance of Hafnia thin films deposited by Electron Beam Deposition, Reactive Low Voltage Ion Plating and Dual Ion Beam Sputtering

Laurent Gallais (1) , Jeremie Capoulade (1) , Mireille Commandre (1) , Jean-Yves Natoli (1) , Michel Cathelinaud (1) , Cihan Koc , Michel Lequime (1)

1 FRESNEL - Institut FRESNEL

Domaines: Optique [physics.optics]

Laurent Gallais, Jeremie Capoulade, Mireille Commandre, Jean-Yves Natoli, Michel Cathelinaud, et al.. Laser damage resistance of Hafnia thin films deposited by Electron Beam Deposition, Reactive Low Voltage Ion Plating and Dual Ion Beam Sputtering. Applied optics, 2008, 47 (13), pp.C107-C113. ⟨hal-00242619⟩