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IC Debug and Defect Localization using Dynamic Laser Stimulation and Time-Resolved Emission

Abstract : Dynamic optical techniques (light emission and laser stimulation techniques) are routinely used for precise IC defect localization. As device technology is more and more shrinking, developing new techniques for defect localization is becoming a crucial challenge. Dynamic Laser Stimulation (DLS) techniques based on near-infrared laser scanning are used for failure analysis, design debug and time margin studies or critical path analysis. Using Time Resolved Emission (TRE) technique, scan chain, timing and logic failure are shown to be quickly and precisely identified [1]. On 180nm and 120 nm test structures devices, we will present results showing the accuracy and the complementary of DLS and TRE in order to help Failure Analysists or Debug engineers to localize defect without performing physical analysis.
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https://hal.archives-ouvertes.fr/hal-00204582
Contributor : Frédéric Darracq <>
Submitted on : Tuesday, January 15, 2008 - 9:46:56 AM
Last modification on : Thursday, July 25, 2019 - 4:34:15 PM

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Julie Ferrigno, Philippe Perdu, Kevin Sanchez, Dean Lewis, Michel Vallet, et al.. IC Debug and Defect Localization using Dynamic Laser Stimulation and Time-Resolved Emission. 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2007, Jul 2007, Bangalore, India. pp.229-234, 10.1109/IPFA.2007.4378090, ⟨10.1109/IPFA.2007.4378090⟩. ⟨hal-00204582⟩

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