Dynamic optical techniques for IC debug and failure analysis

Julie Ferrigno (1, 2) , Romain Desplats (2) , Philippe Perdu (2) , Kevin Sanchez (2) , Félix Beaudoin (2) , Dean Lewis (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 CNES - Centre National d'Études Spatiales [Toulouse]

Optical techniques (light emission and laser stimulation techniques) are routinely used for precise IC defect localization. At the early stage of an analysis, choosing the right technique is an increasingly complex task. In some cases, one technique may bring value but no the others. Using an 180nm test structure device we present results showing the complementary of emission microscopy (EMMI), time-resolved emission (TRE) and dynamic laser stimulation (DLS) in order to help failure analyists or debug engineers to choose the right approach

Domaines: Electronique

Julie Ferrigno, Romain Desplats, Philippe Perdu, Kevin Sanchez, Félix Beaudoin, et al.. Dynamic optical techniques for IC debug and failure analysis. 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2006, Jul 2006, Singapour, Singapore. pp.320-326, 10.1109/IPFA.2006.250980, ⟨10.1109/IPFA.2006.250980⟩. ⟨hal-00204578⟩