Application of various optical techniques for ESD defect localization

Abstract : Various optical defect localization techniques are applied on the same integrated circuits (IC). These circuits were previously stressed by Electro Static Discharges (ESD) to create defects. The results obtained by each technique were analyzed to determine the nature of the defects. The different data are compared to assess their sensitivity and to evaluate the contribution of each technique in a failure analysis flow
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Microelectronics Reliability, Elsevier, 2006, 46 (9-11), pp.1563-1568, 10.1016/j.microrel.2006.07.021. 〈10.1016/j.microrel.2006.07.021〉
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https://hal.archives-ouvertes.fr/hal-00204570
Contributeur : Frédéric Darracq <>
Soumis le : mardi 15 janvier 2008 - 08:15:55
Dernière modification le : vendredi 26 octobre 2018 - 10:36:21

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Fabien Essely, Frédéric Darracq, Vincent Pouget, Mustapha Remmach, Félix Beaudoin, et al.. Application of various optical techniques for ESD defect localization. Microelectronics Reliability, Elsevier, 2006, 46 (9-11), pp.1563-1568, 10.1016/j.microrel.2006.07.021. 〈10.1016/j.microrel.2006.07.021〉. 〈hal-00204570〉

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