Chemical sensing: millimeter size resonant microcantilever performance

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https://hal.archives-ouvertes.fr/hal-00203744
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Submitted on : Friday, January 11, 2008 - 10:28:37 AM
Last modification on : Friday, April 5, 2019 - 12:06:01 PM

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  • HAL Id : hal-00203744, version 1

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Ludivine Fadel, Frédéric Lochon, Isabelle Dufour, Olivier Français. Chemical sensing: millimeter size resonant microcantilever performance. Journal of Micromechanics and Microengineering, IOP Publishing, 2004, 14, pp.1. ⟨hal-00203744⟩

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