Joule Expansion Imaging Techniques on Microlectronic Devices

S. Grauby (1) , L.-D. Patino Lopez, (1) , A. Salhi (1) , E. Puyoo (1) , J.-M. Rampnoux (1) , W. Claeys (1) , S. Dilhaire (1)

1 CPMOH - Centre de physique moléculaire optique et hertzienne

We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution.

Mots clés: Scanning Thermal imaging; interferometry; Joule expansion

Domaines: Science des matériaux [cond-mat.mtrl-sci]

S. Grauby, L.-D. Patino Lopez,, A. Salhi, E. Puyoo, J.-M. Rampnoux, et al.. Joule Expansion Imaging Techniques on Microlectronic Devices. THERMINIC 2007, Sep 2007, Budapest, Hungary. pp.174-179. ⟨hal-00202556⟩