Qualitative Temperature Variation Imaging by Thermoreflectance and SThM Techniques

Stéphane Grauby (1) , A. Salhi (1) , L.D. Patino Lopez (1) , S. Dilhaire (1) , B. Charlot (2) , W. Claeys (1) , B. Cretin (3) , G. Tessier (3) , N. Trannoy (3) , P. Vairac (3) , S. Volz (3)

1 CPMOH - Centre de physique moléculaire optique et hertzienne
2 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés
3 MN - Micro et nanothermique

We have studied temperature variations on two dissipative structures with two different techniques. The dissipative structures are constituted of thin (0.35µm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 µm. On one hand, we have used a thermoreflectance imaging technique which is a well-known non contact optical method to evaluate temperature variations but whose spatial resolution is limited by diffraction. On the other hand, we have used a Scanning Thermal Microscope (SThM) to study the thermal behaviour of these small dissipative structures. We compare qualitative results obtained by both methods and we present their advantages and limitations for temperature measurements on microelectronic devices.

Mots clés: Thermal imaging; spatial resolution; scanning thermal microscopy

Domaines: Architectures Matérielles [cs.AR]

Stéphane Grauby, A. Salhi, L.D. Patino Lopez, S. Dilhaire, B. Charlot, et al.. Qualitative Temperature Variation Imaging by Thermoreflectance and SThM Techniques. THERMINIC 2005, Sep 2005, Belgirate, Lago Maggiore, Italy. pp.284-289. ⟨hal-00189487⟩