PACKAGING OF RF MEMS SWITCHING FUNCTIONS ON ALUMINA SUBSTRATE

Mohamad El Khatib (1) , Arnaud Pothier (1) , Pierre Blondy (1)

1 MINACOM

Recently the strong demands in wireless communication requires expanding development for the application of RF MEMS (Radio Frequency micro electro mechanical systems) sensing devices such as micro-switches, tunable capacitors because it offers lower power consumption, lower losses, higher linearity and higher Q factors compared with conventional communications components. To accelerate commercialisation of RF MEMS products, development for packaging technologies is one of the most critical issues should be solved beforehand

Mots clés: Micro-package alumina; SPNT; RF MEMS

Domaines: Architectures Matérielles [cs.AR]

Mohamad El Khatib, Arnaud Pothier, Pierre Blondy. PACKAGING OF RF MEMS SWITCHING FUNCTIONS ON ALUMINA SUBSTRATE. DTIP 2006, Dec 2006, Stresa, Lago Maggiore, Italy. 4 p. ⟨hal-00189263⟩