Modelling and H1 force control of a nonlinear piezoelectric cantilever.

Micky Rakotondrabe (1) , Yassine Haddab (1) , Philippe Lutz (1)

1 LAB - Laboratoire d'automatique de Besançon

During a micromanipulation, it is important to have the same performances whatever the manipulated object is. We present in this paper the control of the force applied to flexible and rigid micro-objects by a piezoelectric cantilever. First, the voltage-force transfer function is modeled. The hysteresis and creep phenomena are taken into account. The reliance of the model on the characteristics of the micro-objects is clearly detailed. Then, in order to reject disturbances and maintain traking performances required in micromanipulation, a H1 controller is designed. Finally, the experimental results end the paper.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Yassine Haddab, Philippe Lutz. Modelling and H1 force control of a nonlinear piezoelectric cantilever.. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'07., Oct 2007, San Diego, CA., United States. pp.3131-3136. ⟨hal-00187286⟩