Study of the mass sensitivity of SH-APM sensors with MapleV

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https://hal.archives-ouvertes.fr/hal-00183758
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Submitted on : Tuesday, October 30, 2007 - 11:20:50 AM
Last modification on : Tuesday, February 27, 2018 - 11:18:01 PM

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  • HAL Id : hal-00183758, version 1

Citation

Irène Esteban, Corinne Dejous, Dominique Rebiere, Jacques Pistre, Roger Planade. Study of the mass sensitivity of SH-APM sensors with MapleV. Sensors and Actuators A: Physical , Elsevier, 1999, 76, pp.1. ⟨hal-00183758⟩

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