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Light-ion beam analysis for microelectronic applications

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https://hal.archives-ouvertes.fr/hal-00183524
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Submitted on : Tuesday, October 30, 2007 - 9:06:47 AM
Last modification on : Tuesday, November 9, 2021 - 10:22:08 AM

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  • HAL Id : hal-00183524, version 1

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Lionel Hirsch, Pascal Tardy, Guillaume Wantz, Nolwen Huby, P. Moretto, et al.. Light-ion beam analysis for microelectronic applications. Nucl. Instr. and Meth. B, 2005, 240, pp.1. ⟨hal-00183524⟩

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