Analytical modeling of microcantilever and microbridge type chemical sensors: optimisation of the gravimetric sensitivity

Abstract : In this paper, we study the moving sensors based on the change of the resonance frequency. Usually in such microsensors, the vibrating microstructures are parallelepiped-shaped or standard AFM V-shaped microcantilevers with sensitive coating at the free end. The aim of this paper is to find an optimized shape to obtain the maximal gravimetric sensitivity.
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https://hal.archives-ouvertes.fr/hal-00183281
Contributor : Isabelle Dufour <>
Submitted on : Tuesday, November 6, 2007 - 9:14:16 PM
Last modification on : Friday, April 5, 2019 - 12:06:01 PM

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  • HAL Id : hal-00183281, version 1

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Isabelle Dufour, Ludivine Fadel. Analytical modeling of microcantilever and microbridge type chemical sensors: optimisation of the gravimetric sensitivity. 9th International Meeting on Chemical Sensors, 2002, Boston, United States. 1 page. ⟨hal-00183281⟩

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