High order modes to improve sensitivity of resonant microcantilever chemical microsensors

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https://hal.archives-ouvertes.fr/hal-00183275
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Submitted on : Monday, October 29, 2007 - 4:23:03 PM
Last modification on : Friday, April 5, 2019 - 12:06:01 PM

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  • HAL Id : hal-00183275, version 1

Citation

Isabelle Dufour, Frédéric Lochon, Ludivine Fadel. High order modes to improve sensitivity of resonant microcantilever chemical microsensors. 10th International Meeting on Chemical Sensors, 2004, Japan. pp.1. ⟨hal-00183275⟩

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