Microcantilever: a chemical resonant sensor

Abstract : Silicon micromachined cantilevers can be used as chemical resonant sensor by adding a sensitive layer on the device structure. In this paper, the process technology, based on the use of SOI wafer, and the sensitive layer deposition are described. Using four different geometrical microcantilevers, the frequency dependence to mass modification is measured and allows to predict gas sensor response.
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https://hal.archives-ouvertes.fr/hal-00181963
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  • HAL Id : hal-00181963, version 1

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Ludivine Fadel, Isabelle Dufour, Frédéric Lochon, Olivier Français. Microcantilever: a chemical resonant sensor. MME'03, 14th Micromechanics Europe Workshop, Nov 2003, Delft, Netherlands. pp. 37-40. ⟨hal-00181963⟩

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