GaN materials growth by MOVPE in a new design of reactor using DMHy and NH3

S. Gautier (1) , C. Sartel (1) , S. Ould-Saad Hamady (1) , J. Martin (1) , A. Sirenko , A. Ougazzaden

1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes

Domaines: Optique [physics.optics]; Science des matériaux [cond-mat.mtrl-sci]

S. Gautier, C. Sartel, S. Ould-Saad Hamady, J. Martin, A. Sirenko, et al.. GaN materials growth by MOVPE in a new design of reactor using DMHy and NH3. Journal of Crystal Growth, 2007, 298, pp.428-432. ⟨hal-00181789⟩