Oscillating composition of Fe–W alloy thin films grown by magnetron co-sputtering

P. Plantin (1) , A.-L. Thomann (1) , P. Brault (1) , P.-O. Renault , S. Laaroussi , P. Goudeau , B. Boubeker , T. Sauvage

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Mots clés: Magnetron sputtering; Alloy; Iron; Tungsten

Domaines: Plasmas

P. Plantin, A.-L. Thomann, P. Brault, P.-O. Renault, S. Laaroussi, et al.. Oscillating composition of Fe–W alloy thin films grown by magnetron co-sputtering. Surface and Coatings Technology, 2007, 201, pp.7115-7121. ⟨hal-00180182⟩