Comparison of solutions to the scatterometry inverse problem, Metrology, Inspection, and Process Control for Microlithography XVIII, pp.564-575, 2004. ,
DOI : 10.1117/12.538662
Analysis and applications of optical diffraction by gratings, Proceedings of the IEEE, vol.73, issue.5, pp.894-937, 1985. ,
DOI : 10.1109/PROC.1985.13220
Solution of Ill-posed Problems, 1977. ,
Measurement of residual thickness using scatterometry, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.23, issue.6, pp.3069-3074, 2005. ,
DOI : 10.1116/1.2130345
URL : https://hal.archives-ouvertes.fr/hal-00020910
Gpgpu: General-purpose computation on graphics hardware, Course 32 at ACM SIGGRAPH, 2004. ,
A graphics hardware accelerated algorithm for nearest neighbor search, Computational Science ? ICCS LNCS, vol.3994, pp.196-199, 2006. ,