Integrated saw filter into a silicon passive integration connecting substrate

Vincent Georgel (1, 2) , Fabrice Verjus (1) , Eric van Grunsven (3) , Patrick Poulichet (2) , Gaelle Bazin Lissorgues (2) , Stéphane Chamaly , Claude Pellet (4) , Tarik Bourouina (2)

1 NXP/SIP PROGRAM - System in Package Program
2 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
3 Electronic Packaging and Thin Films
4 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Vincent Georgel, Fabrice Verjus, Eric van Grunsven, Patrick Poulichet, Gaelle Bazin Lissorgues, et al.. Integrated saw filter into a silicon passive integration connecting substrate. 20th Eurosensor conference, Sep 2006, Göteborg, Sweden. pp.37. ⟨hal-00165716⟩