Devices based on free standing thick-films made with a new sacrificial layer process

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https://hal.archives-ouvertes.fr/hal-00164612
Contributor : Isabelle Dufour <>
Submitted on : Saturday, July 21, 2007 - 5:37:22 PM
Last modification on : Thursday, January 11, 2018 - 6:21:07 AM

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  • HAL Id : hal-00164612, version 1

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Claude Lucat, Patrick Ginet, Christophe Castille, Hélène Debéda, Francis Ménil. Devices based on free standing thick-films made with a new sacrificial layer process. 31 Int. Conf. IMAPS, Sep 2007, Rzeszow-Krasiczyn, Poland. ⟨hal-00164612⟩

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