Optimized aspect ratios for high quality factor microcantilevers in air

Abstract : A theoretical study which take into account several losses (viscous losses, support losses, acoustic radiation, thermoelastic losses) has already shown that it is possible to perform a quality factor optimization by adjusting the aspect ratios of a microcantilever1. The presence of an optimum quality factor is verified experimentaly.
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Contributor : Isabelle Dufour <>
Submitted on : Tuesday, November 6, 2007 - 8:56:48 PM
Last modification on : Friday, April 5, 2019 - 12:06:08 PM

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  • HAL Id : hal-00160480, version 1

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Frédéric Lochon, Naser Belmiloud, Isabelle Dufour, Dominique Rebière. Optimized aspect ratios for high quality factor microcantilevers in air. International Workshop on Nanomechanical Sensors, 2007, Montréal, Canada. Department of Physics, McGill University, Canada, pp. 40, 2007. 〈hal-00160480〉

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