Optimized aspect ratios for high quality factor microcantilevers in air

Abstract : A theoretical study which take into account several losses (viscous losses, support losses, acoustic radiation, thermoelastic losses) has already shown that it is possible to perform a quality factor optimization by adjusting the aspect ratios of a microcantilever1. The presence of an optimum quality factor is verified experimentaly.
Type de document :
Communication dans un congrès
International Workshop on Nanomechanical Sensors, 2007, Montréal, Canada. Department of Physics, McGill University, Canada, pp. 40, 2007
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https://hal.archives-ouvertes.fr/hal-00160480
Contributeur : Isabelle Dufour <>
Soumis le : mardi 6 novembre 2007 - 20:56:48
Dernière modification le : jeudi 11 janvier 2018 - 06:21:07

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  • HAL Id : hal-00160480, version 1

Citation

Frédéric Lochon, Naser Belmiloud, Isabelle Dufour, Dominique Rebière. Optimized aspect ratios for high quality factor microcantilevers in air. International Workshop on Nanomechanical Sensors, 2007, Montréal, Canada. Department of Physics, McGill University, Canada, pp. 40, 2007. 〈hal-00160480〉

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