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Substrate transfer process for InP-based heterostructure barrier varactor devices

S. Arscott 1 P. Mounaix 1 D. Lippens 1 
1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
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https://hal.archives-ouvertes.fr/hal-02348017
Contributor : Stephen Arscott Connect in order to contact the contributor
Submitted on : Tuesday, November 5, 2019 - 12:16:09 PM
Last modification on : Wednesday, March 23, 2022 - 3:50:28 PM

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CNRS | UNIV-VALENCIENNES | IEMN | UNIV-LILLE

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S. Arscott, P. Mounaix, D. Lippens. Substrate transfer process for InP-based heterostructure barrier varactor devices. Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, American Vacuum Society (AVS), 2000, 18 (1), pp.150. ⟨10.1116/1.591167⟩. ⟨hal-02348017⟩

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