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Determination of the electrical properties of ultrathin silicon-based dielectric films : thermally grown SiNx

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https://hal.archives-ouvertes.fr/hal-00152162
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Submitted on : Wednesday, June 6, 2007 - 10:44:50 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:21 PM

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  • HAL Id : hal-00152162, version 1

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N. Pic, A. Glachant, S. Nitsche, J.Y. Hoarau, D. Goguenheim, et al.. Determination of the electrical properties of ultrathin silicon-based dielectric films : thermally grown SiNx. Solid-State Electronics, Elsevier, 2001, 45, pp.1265-1270. ⟨hal-00152162⟩

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