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Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics

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https://hal.archives-ouvertes.fr/hal-00148744
Contributor : Collection Iemn <>
Submitted on : Wednesday, May 23, 2007 - 10:20:38 AM
Last modification on : Monday, March 2, 2020 - 1:38:04 PM

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  • HAL Id : hal-00148744, version 1

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G. Carlotti, P. Colpani, D. Piccolo, S. Santucci, V. Senez, et al.. Measurement of the elastic and viscoelastic properties of dielectric films used in microelectronics. Thin Solid Films, Elsevier, 2002, 414, pp.99-104. ⟨hal-00148744⟩

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