Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00148736
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Submitted on : Wednesday, May 23, 2007 - 10:20:29 AM
Last modification on : Friday, November 16, 2018 - 4:28:04 PM

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  • HAL Id : hal-00148736, version 1

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D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, C. Combi, et al.. Design of clamped-clamped beam resonator in thick-film epitaxial polysilicon technology. 2002, pp.447-450. ⟨hal-00148736⟩

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