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Conference papers

High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00147730
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Monday, May 21, 2007 - 9:07:09 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:20 PM

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  • HAL Id : hal-00147730, version 1

Citation

Cédric Ayela, Thierry Leichle, C. Bergaud, Liviu Nicu, Eric Cattan, et al.. High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media. 2006, 6 pp. ⟨hal-00147730⟩

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