New all 2-inch manufacturable high performance evanescent coupled waveguide photodiodes with etched mirrors for 40Gb/s optical receivers

Mohand Achouche (1) , Stéphane Demiguel (1) , Estelle Derouin , David Carpentier , F. Barthe , Fabrice Blache , Vincent Magnin (2, 3) , Joseph Harari (2, 3) , Didier Decoster (2, 3)

1 Laboratoire Opto+, Alcatel R&I Marcoussis
2 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 OPTO - IEMN - Optoélectronique - IEMN

Evanescent PIN photodiodes are fabricated using all 2”-InP processing including on-wafer mirrors and coatings. 0.73 A/W responsivity at 1.55 µm, -1 dB vertical coupling tolerance of 2.2 µm and 47 GHz bandwidth are simultaneously demonstrated.

Mots clés: Manufacturing; Optical coupling; Etching; Mirrors; Optical receivers; Optical waveguides; Photodiodes; Optical fiber polarization; Length measurement; Shape measurement

Domaines: Micro et nanotechnologies/Microélectronique

Mohand Achouche, Stéphane Demiguel, Estelle Derouin, David Carpentier, F. Barthe, et al.. New all 2-inch manufacturable high performance evanescent coupled waveguide photodiodes with etched mirrors for 40Gb/s optical receivers. OFC 2003 Optical Fiber Communications Conference, Mar 2003, Atlanta, United States. pp.341-342, ⟨10.1109/OFC.2003.1248117⟩. ⟨hal-00146497⟩