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Conference papers

Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00146438
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Tuesday, May 15, 2007 - 9:04:19 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:20 PM

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  • HAL Id : hal-00146438, version 1

Citation

V. Agache, P. Bigotte, Bernard Legrand, V. Senez, L. Buchaillot, et al.. Modeling and experimental validation of silicon nanotip oxidation : towards a nanoelectromechanical filter application. 2003, pp.1287-1290. ⟨hal-00146438⟩

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