Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00146406
Contributor : Marie-Renée Friscourt <>
Submitted on : Tuesday, May 15, 2007 - 8:30:37 AM
Last modification on : Friday, November 16, 2018 - 4:28:04 PM

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  • HAL Id : hal-00146406, version 1

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D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, D. Collard, et al.. Microelectromechanical coupled resonsator IF filters with variable bandwidth in thick-film epitaxial polysilicon technology. 2003, pp.F23-F26. ⟨hal-00146406⟩

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