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Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction

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https://hal.archives-ouvertes.fr/hal-00146391
Contributor : Collection Iemn <>
Submitted on : Tuesday, May 15, 2007 - 8:18:13 AM
Last modification on : Monday, March 2, 2020 - 1:38:04 PM

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  • HAL Id : hal-00146391, version 1

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D. Galayko, A. Kaiser, L. Buchaillot, Bernard Legrand, D. Collard, et al.. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode to resonator gap reduction. Journal of Micromechanics and Microengineering, IOP Publishing, 2003, 13, pp.134-140. ⟨hal-00146391⟩

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