Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching

Samuel Dupont (1) , Arnaud Beaurain (1) , Patrice Miska , Malek Zegaoui (1) , Jean-Pierre Vilcot (2, 1) , Hongwu Li (1) , M. Constant (1, 3) , Didier Decoster (1) , Jean Chazelas (4)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 PhLAM - Laboratoire de Physique des Lasers, Atomes et Molécules - UMR 8523
3 LASIRE - Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement - UMR 8516
4 Thales Airborne Systems

The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 μm. For the 0.5 μm width, the propagation losses at λ=1.55 μm as low as 4.2 dB/mm have been measured.

Domaines: Sciences de l'ingénieur [physics]

Samuel Dupont, Arnaud Beaurain, Patrice Miska, Malek Zegaoui, Jean-Pierre Vilcot, et al.. Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching. Electronics Letters, 2004, 40, pp.865-866. ⟨hal-00141187⟩