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Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology

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https://hal.archives-ouvertes.fr/hal-00138651
Contributor : Collection Iemn <>
Submitted on : Tuesday, March 27, 2007 - 10:22:55 AM
Last modification on : Monday, March 2, 2020 - 1:38:03 PM

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  • HAL Id : hal-00138651, version 1

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D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, C. Combi, et al.. Coupled-resonator micromechanical filters with voltage tunable bandpass characteristic in thickfilm polysilicon technology. Sensors and Actuators A: Physical , Elsevier, 2006, 126, pp.227-240. ⟨hal-00138651⟩

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