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Numerical analysis of the process induced stresses in silicon microstructures : application to micromachined cantilever

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https://hal.archives-ouvertes.fr/hal-00130876
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Submitted on : Wednesday, February 14, 2007 - 10:47:24 AM
Last modification on : Friday, December 3, 2021 - 4:04:04 PM

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  • HAL Id : hal-00130876, version 1

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V. Senez, T. Hoffmann, A. Armigliato, I. de Wolf. Numerical analysis of the process induced stresses in silicon microstructures : application to micromachined cantilever. Smart Materials and Structures, IOP Publishing, 2006, 15, pp.S47-S56. ⟨hal-00130876⟩

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