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Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm

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https://hal.archives-ouvertes.fr/hal-02347482
Contributor : Stephen Arscott Connect in order to contact the contributor
Submitted on : Tuesday, November 5, 2019 - 11:12:11 AM
Last modification on : Friday, December 3, 2021 - 4:04:11 PM

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Matthieu Gaudet, Jean-Christophe Camart, Lionel Buchaillot, S. Arscott. Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm. Applied Physics Letters, American Institute of Physics, 2006, 88 (2), pp.024107. ⟨10.1063/1.2164390⟩. ⟨hal-02347482⟩

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