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Communication Dans Un Congrès Année : 2005

RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers

Résumé

In this paper, the design, fabrication, and characterization of a new class of electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes with nanometer scale lateral gap (<50 nm), while achieving high eigenfrequencies in the GHz range for lateral flexural solicitation. Using an electromechanical amplitude modulation setup, a fundamental resonance frequency at 1.12 GHz has been extracted with a quality factor of 180, and its first harmonic has been measured at 2.5 GHz associated with a quality factor of 62
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Dates et versions

hal-00128656 , version 1 (02-02-2007)

Identifiants

  • HAL Id : hal-00128656 , version 1

Citer

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot. RF blade nano-electromechanical resonator with self-aligned process for definition of lateral electrostatic transducers. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2005, 2005, Montreux, Switzerland. pp.26-31. ⟨hal-00128656⟩
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