Observer based position detection of a cantilever in atomic force microscopy

Michal Hrouzek (1) , Gildas Besancon (1) , Alina Voda (1) , Joël Chevrier

1 LAG - Laboratoire d'automatique de Grenoble

Application of observer techniques in position detection of thermally disturbed cantilever is able to significantly improve the performance and accuracy of the (interaction) force measurement. In this paper, we propose a detection technique which applies an observer to measure interaction forces of order of pico newtons with standard Atomic Force Microscope. This technique can be a useful tool for non–contact measurement with constant surface interaction.

Mots clés: Observer; Atomic Force Microscopy; Thermal Noise

Domaines: Automatique / Robotique; Instrumentations et Détecteurs [physics.ins-det]

Michal Hrouzek, Gildas Besancon, Alina Voda, Joël Chevrier. Observer based position detection of a cantilever in atomic force microscopy. Sep 2006. ⟨hal-00128267⟩