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Influence of the deposition parameters on the texture of boron nitride thin films synthesized in a microwave plasma-enhanced reactor

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https://hal.archives-ouvertes.fr/hal-00127946
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Submitted on : Tuesday, January 30, 2007 - 11:18:31 AM
Last modification on : Tuesday, November 30, 2021 - 9:02:04 AM

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  • HAL Id : hal-00127946, version 1

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P. Thévenin, M. Eliaoui, A. Ahaitouf, A. Soltani, A. Bath. Influence of the deposition parameters on the texture of boron nitride thin films synthesized in a microwave plasma-enhanced reactor. Surface and Coatings Technology, Elsevier, 2006, 200, pp.6444-6448. ⟨hal-00127946⟩

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