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Silicon surface nano-oxidation using scanning probe microscopy

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https://hal.archives-ouvertes.fr/hal-00127846
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Submitted on : Tuesday, January 30, 2007 - 9:10:51 AM
Last modification on : Saturday, October 9, 2021 - 3:11:34 AM

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  • HAL Id : hal-00127846, version 1

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D. Stievenard, Bernard Legrand. Silicon surface nano-oxidation using scanning probe microscopy. Progress in Surface Science, Elsevier, 2006, 81, pp.112-140. ⟨hal-00127846⟩

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