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High pressure-resistant SU-8 microchannels for monolithic porous structure integration

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https://hal.archives-ouvertes.fr/hal-02347498
Contributor : Stephen Arscott Connect in order to contact the contributor
Submitted on : Tuesday, November 5, 2019 - 11:13:41 AM
Last modification on : Tuesday, October 19, 2021 - 6:38:25 PM

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Julien Carlier, Katarzyna Chuda, S. Arscott, Vincent Thomy, Bernard Verbeke, et al.. High pressure-resistant SU-8 microchannels for monolithic porous structure integration. Journal of Micromechanics and Microengineering, IOP Publishing, 2006, 16 (10), pp.2211-2219. ⟨10.1088/0960-1317/16/10/039⟩. ⟨hal-02347498⟩

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