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Communication Dans Un Congrès Année : 2005

1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers

Résumé

For the first time, an electromechanical resonator based on a blade geometry is proposed. This particular geometry allows self-alignment of the mechanical resonator to its lateral electrodes while achieving high eigenfrequencies in the GHz range.
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Dates et versions

hal-00125628 , version 1 (22-01-2007)

Identifiants

Citer

Vincent Agache, Bernard Legrand, Dominique Collard, Hiroyuki Fujita, Lionel Buchaillot. 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers. 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005, Jan 2005, Miami Beach, United States. pp.121-124, ⟨10.1109/MEMSYS.2005.1453882⟩. ⟨hal-00125628⟩
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