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Conference papers

1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers

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https://hal.archives-ouvertes.fr/hal-00125628
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Submitted on : Monday, January 22, 2007 - 10:27:49 AM
Last modification on : Friday, December 3, 2021 - 4:04:04 PM

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  • HAL Id : hal-00125628, version 1

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V. Agache, Bernard Legrand, D. Collard, H. Fujita, L. Buchaillot. 1.1 GHz silicon blade nano-electromechanical resonator featuring 20 nm gap lateral transducers. 2005, pp.121-124. ⟨hal-00125628⟩

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