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MEMS reliability : metrology set-up for investigation of fatigue causes

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https://hal.archives-ouvertes.fr/hal-00125627
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Submitted on : Monday, January 22, 2007 - 10:27:49 AM
Last modification on : Tuesday, October 19, 2021 - 6:37:47 PM

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  • HAL Id : hal-00125627, version 1

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O. Millet, O. Blanrue, Bernard Legrand, D. Collard, L. Buchaillot. MEMS reliability : metrology set-up for investigation of fatigue causes. 2005, pp.483-486. ⟨hal-00125627⟩

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