Design and fabrication of a new system for vibration energy harvesting

G. Despesse (1) , T. Jager (1) , J.J. Chaillout (1) , J.M. Leger (1) , Skandar Basrour (2, 3)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
3 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

Global simulations, designs and characterisations of a broadband vibration energy scavenging system are here reported. High damping electrostatic conversion structures have been investigated. Mathematical analytical models have been performed and confronted with ANSYS simulations. A scavenging electronics has also been developed: taking in account ohmic, capacitive and inductive losses, the global conversion efficiency has been calculated. Finally, a macro and a micro resonant structure tuned to 50 Hz have been realized. A scavenged power of 1 mW is already available on the macro structure under a vibration amplitude of 90 /spl mu/m at 50 Hz. The corresponding global conversion efficiency is about 60 % which is in good agreement with mechanical and electrical simulations.

Mots clés: damping; direct energy conversion; electrostatics power electronics; vibrations

Domaines: Micro et nanotechnologies/Microélectronique

G. Despesse, T. Jager, J.J. Chaillout, J.M. Leger, Skandar Basrour. Design and fabrication of a new system for vibration energy harvesting. Research in Microelectronics and Electronics, 2005 PhD, 2005, Lausanne, Switzerland. pp.225 - 228 vol.1, ⟨10.1109/RME.2005.1543034⟩. ⟨hal-00080001⟩