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Determination by nanoindentation method of sputtered PZT films mechanical parameters for Si-MEMS applications

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https://hal.archives-ouvertes.fr/hal-00019721
Contributor : Christine Froidevaux Connect in order to contact the contributor
Submitted on : Monday, February 27, 2006 - 10:43:34 AM
Last modification on : Tuesday, October 19, 2021 - 6:38:22 PM

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  • HAL Id : hal-00019721, version 1

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Patrick Delobelle, E. Fribourg-Blanc, Olivier Guillon, S. Soyer, Eric Cattan, et al.. Determination by nanoindentation method of sputtered PZT films mechanical parameters for Si-MEMS applications. Integr. Ferroelectrics, 2005, 69, pp. 213-221. ⟨hal-00019721⟩

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