Structural, Electrical, Optical and Mechanical Characterization of Decorative ZrOxNy Thin Films

P. Carvalho , F. Vaz , L. Cunha , L. Rebouta , Tavares C.J. , C. Moura , E. Alves , A. Cavaleiro , P. Goudeau (1) , Eric Le Bourhis (1) , Riviere J. P. (1) , Pierson J. F. , O. Banakh

1 LMP - Laboratoire de métallurgie physique

P. Carvalho, F. Vaz, L. Cunha, L. Rebouta, Tavares C.J., et al.. Structural, Electrical, Optical and Mechanical Characterization of Decorative ZrOxNy Thin Films. Journal of Applied Physics, 2005, 98, pp.1-8. ⟨hal-00016716⟩