Model and parameter identification using non-contact loading and full-field measurement

Abstract : An experimental set-up that allows one to measure out-of-plane displacement fields of micro-cantilever surfaces in reflection microscopy is presented. It is derived from a Nomarski shear-interferometer. When shear is greater than the length of the microcantilever, this interferometer, used with a sinusoidal phase modulation and four integrating buckets, enables one to obtain displacement fields of the observed surface. An unknown electrostatic loading is applied. The identification of the elastic properties of the cantilever is difficult because of the unknown loading. An identification technique is derived from the equilibrium gap method to solve this problem, using some properties of the perturbative kinematic fields to evaluate modeling errors of the loading pattern. The displacement field measured by the shear interferometer is used to identify simultaneously the load field, which is found not to reduce to a pressure field, and the elastic property field of the cantilever.
Keywords : Photomechanics
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Contributor : François Hild <>
Submitted on : Monday, November 14, 2005 - 12:49:37 PM
Last modification on : Thursday, July 4, 2019 - 11:00:05 AM


  • HAL Id : hal-00013812, version 1


Fabien Amiot, François Hild, Jean Paul Roger. Model and parameter identification using non-contact loading and full-field measurement. 2005, 6 p. ⟨hal-00013812⟩



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