Deformable magnetic mirror for adaptive optics: first results

O. Cugat (1) , P. Mounaix (2) , Skandar Basrour (3, 4) , C. Divoux (1) , G. Reyne (1)

1 LEG - Laboratoire d'électrotechnique de Grenoble
2 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
4 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

An alternative approach to compact deformable mirrors for adaptive optics is developed. A prototype of a two inch mirror composed of a thin polymer membrane covered with a matrix of permanent magnets and an array of microcoils was built. Several complementary modelling tools were used to study the behaviour of the device. Promising first results show regular deformations of up to 20 mu m, a good linearity and a bandwith of 200 Hz. This novel technology should enable higher resolution with smaller, lighter integrated mirrors.

Mots clés: deformable-magnetic-mirror; adaptive-optics; compact-deformable-mirrors

Domaines: Micro et nanotechnologies/Microélectronique

O. Cugat, P. Mounaix, Skandar Basrour, C. Divoux, G. Reyne. Deformable magnetic mirror for adaptive optics: first results. Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), 2000, Miyazaki, Japan. pp.485-90, ⟨10.1109/MEMSYS.2000.838475⟩. ⟨hal-00008672⟩