Amorphoous SiC films prepared by low energy cluster beam deposition

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https://hal.archives-ouvertes.fr/hal-00006995
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Submitted on : Monday, July 11, 2005 - 5:07:56 PM
Last modification on : Wednesday, October 9, 2019 - 2:06:15 PM

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P. Melinon, P. Keghelian, J.L. Rousset, A.M. Cadrot, A. Malhomme, et al.. Amorphoous SiC films prepared by low energy cluster beam deposition. Philosophical Magazine a, Informa UK (Taylor & Francis), 2000, 89, pp.143-154. ⟨hal-00006995⟩

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