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A General Procedure for the Design of Bulk Acoustic Wave Filters

Abstract : This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth-Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride-based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO(3)) BAW filter for wide-band filtering applications.
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Submitted on : Wednesday, April 21, 2021 - 9:23:57 PM
Last modification on : Thursday, April 22, 2021 - 4:57:03 PM


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Lise Catherinot, Sylvain Giraud, Matthieu Chatras, Stéphane Bila, Dominique Cros, et al.. A General Procedure for the Design of Bulk Acoustic Wave Filters. International Journal of RF and Microwave Computer-Aided Engineering, Wiley, 2011, 21 (5), pp.458-465. ⟨10.1002/mmce.20550⟩. ⟨hal-00651231⟩



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