Atmospheric Plasma DC Source in the Micro Scale Elaborated by Micro-Nanotechnologies

Ronan Michaud (1) , Sylvain Iséni (1) , Arnaud Stolz (1) , Philippe Lefaucheux (1) , Remi Dussart (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Plasma micro reactors are in their whole elaborated in clean room by MEMS fabrication techniques. They are usually made on silicon platform and constituted by SiO2 dielectric grown by thermal oxidation and nickel coated by PVD process. Electrical and optical characterizations are the main diagnostics used to determine the properties of the discharge and the robustness of the device. SEM images are also made before and after plasma operation. These DC microdischarges can operate continuously during more than 24 hours in stable regime from 100 Torr up to the atmospheric pressure. In these conditions, a high density of reactive species is produced and can be used for gas, liquid or surface treatment.

Domaines: Physique des plasmas [physics.plasm-ph]; Plasmas; Micro et nanotechnologies/Microélectronique

Ronan Michaud, Sylvain Iséni, Arnaud Stolz, Philippe Lefaucheux, Remi Dussart. Atmospheric Plasma DC Source in the Micro Scale Elaborated by Micro-Nanotechnologies. XXV Europhysics Conference on Atomic and Molecular Physics of Ionized Gases (ESCAMPIG XXII), Jul 2022, Paris, France. ⟨hal-03049315⟩