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Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes Zaatar Y., Al Asmar R., Podlecki J., Youssef S., Abdallah M., Ouaini N., Foucaran A. Microelectronics Journal 38, 4-5 (2007) 538-546 [hal-00324298 - version 1]