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fulltext access Low pressure and atmospheric pressure plasma-jet systems and their application for deposition of thin films
Hubicka Z., Cada M., Churpita O., Virostko P., Adamek P., Sichova H., Sicha M., Jastrabik L., Tichy M., Holdova M. et al
[hal-00002042 - version 1] (2004-10-22)